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The technique of growing an oriented single crystal layer on a substrate wafer is called :

  • A.Oxidation
  • B.Ion-implantation
  • C.Epitaxy
  • D.Diffusion

Answer: C

The technique is epitaxy.

Epitaxy (Greek epi, upon, and taxis, arrangement) is the growth of a thin single-crystal layer on a single-crystal substrate so that the layer continues the substrate's crystal orientation. Vapour phase epitaxy, for example, deposits silicon from silane or silicon tetrachloride onto a heated wafer, and the layer's doping can be set independently of the substrate.

Oxidation grows an amorphous SiO2 layer, ion implantation and diffusion introduce dopants into the existing crystal; none of them grows a new oriented crystal layer.

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