Machine-translated by Google. Questions are authored in English.
Top

Discussion

Positive photo resists are used more than negative photo resists because :

  • A.Negative photo resists are more resistive to light, but their photolithographic resolution is not as high as that of the positive photo resists
  • B.Positive photo resists are more sensitive to light, but their photolithographic resolution is not as high as that of negative photo resists
  • C.Negative photo resists are less sensitive to light
  • D.Positive photo resists are less sensitive to light

Answer: A

The key gives the option stating that negative photoresists do not have as high a resolution as positive photoresists.

A negative resist becomes insoluble where it is exposed. During development the unexposed regions dissolve, but the exposed, cross-linked regions absorb the developer and swell, which distorts fine lines. A positive resist does not swell this way, so it reproduces much smaller features. That higher resolution is why positive resists are preferred for modern VLSI, even though negative resists react to light more readily.

The option claiming positive resists have the lower resolution reverses the decisive fact. Negative resists are not less sensitive to light, and the lower sensitivity of positive resists is a drawback, not the reason they are used more.

No comment is present. Be the first to comment.
Loading…

Post your comment

Please log in or register to post a comment.