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As die size shrinks. the complexity of making the photomasks ...........

  • A.increases
  • B.decreases
  • C.remains the same
  • D.cannot be determined

Answer: A

As die size shrinks, the complexity of making photomasks increases.

Shrinking a die means shrinking its features. Smaller lines and spaces have to be written on the mask with tighter dimensional tolerance and tighter alignment between layers, and once features fall below the wavelength of the exposure light, the mask also needs optical proximity correction, phase-shift features and sub-resolution assist features to print correctly. Each step adds to mask writing time, inspection and cost.

The complexity therefore cannot decrease or stay the same, and the trend is well established, so it is not something that 'cannot be determined'.

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