Discussion
Which of the following signals is produced due to the elastic scattering of electrons by a material?
Answer: B
The signal produced by elastic scattering is the Backscattered electron.
Backscattered electrons are beam electrons deflected back out of the specimen by the nuclei of its atoms, through large-angle elastic (Rutherford) scattering, with little loss of energy. Because heavier atoms scatter more strongly, they give atomic-number contrast in the SEM.
The other signals come from inelastic processes. Secondary electrons are low-energy electrons knocked out of the specimen's atoms by the beam. Auger electrons are emitted when an inner-shell vacancy is filled and the energy is passed to another electron. Photoelectrons are ejected by incident photons, as in XPS, not by electron scattering.
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