Discussion
The size of functional elements in MEMS is of the order of :
Answer: C
The functional elements of MEMS are of the order of \(1 \times 10^{-6}\) m, a micrometre.
Micro-electro-mechanical systems combine tiny mechanical parts (beams, membranes, gears) with electronics on a chip. Their functional elements typically measure from about 1 to 100 micrometres, which is why they are called micro systems.
\(1 \times 10^{-3}\) m (a millimetre) is the scale of the whole device or package, and \(1 \times 10^{-9}\) m (a nanometre) is the scale of NEMS and nanotechnology. \(1 \times 10^{6}\) m is a thousand kilometres.
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